Questions?
[x] SRC Program
GRC

[x] GRC Science Area
MPS – Material & Process Sciences

Content Type
Patent Filings 88
Other 1

Center
EBSM 4
FENA 2
ACE4S 1
CAIST 1
CDADIC 1
CEMPI 1
CHIRP 1
IPC 1
NCRC 1
TxACE 1

Thrust/Theme
PAT – Patterning 24
Factory Systems 18
Pat(MPS) – Patterning 16
BEP – Back End Processes 8
Back End Processes 8
ESH – Environment Safety and Hea... 4
DCMOS – Digital CMOS Technologie... 3
PatMat – Patterning Materials 3
CFM&TCM – CFM & Total Chemical M... 2
Doping Technologies 2
Front End Processes 2
Materials 2
ADS – Alternative Device Structu... 1
AIHW – Artificial Intelligence H... 1
AMS – Analog and Mixed-Signal De... 1
AMS-CSD – Analog/Mixed-Signal Ci... 1
AdvTech – Advanced Technology 1
Advanced Bipolar SOI-MOS Transis... 1
Advanced Devices 1
Advanced Devices & Technologies 1
Advanced Technology Option 1
Analysis Design & Simulation 1
C&S – Controls and Sensing 1
CADT – Computer-Aided Design and... 1
CD – Circuit Design 1
CM – Compact Modeling 1
CSR – Cross-Disciplinary Semicon... 1
Contamination Control 1
Cost Reduction 1
DE – Design Environment 1
DSMS – Device Sciences Modeling ... 1
DV – Design Verification 1
Defect Reduction 1
Deposition 1
DesSyn – Design Synthesis 1
DesTech – Design Techniques 1
EP3C – Efficiency and Performanc... 1
Equip Automation & Process Contr... 1
Equip – Equipment 1
Equip. Auto. and Process Control 1
FACSYS – Factory Systems 1
FAM – Factory Automation & Manag... 1
FEOL – FEOL Processes 1
FacOps – Factory Operations 1
HWS – Hardware Security 1
Heat Signal & Power Distribution 1
Heat Signal Power 1
I3T – Innovative and Intelligent... 1
ISD – Integrated System Design 1
Interconnect Architecture 1
LMD – Logic and Memory Devices 1
LPD – Logic & Physical Design 1
Lithography 1
Logic Design 1
Logistics & Modeling/Simulation 1
MT – Memory Technologies 1
MTMP – Metrology Tools Matls & P... 1
Masks 1
Materials & Measurements 1
Metrology 1
Modeling & Simulation 1
Modeling & TCAD 1
Multi-level Interconnect 1
NCR – Non-Classical CMOS Researc... 1
NEM – Nanoengineered Materials 1
NMP – Nanomanufacturing Material... 1
PKG – Packaging 1
PMM – Packaging Materials and Me... 1
PMS – Packaging Modeling and Sim... 1
PS/E – Process Simplification/En... 1
Package & Electrical Design 1
Package Reliability 1
Packaging & Interconnect Systems 1
Packaging Materials Interfaces 1
PatSys – Patterning Systems 1
PhyDes – Physical Design 1
Physical Design 1
Plasma Etch 1
Process Architecture 1
Processes – Processes 1
Quality & Reliability 1
Rapid Yield Learning 1
Reliability 1
Resist 1
SLD – System Level Design 1
SemiSynBio – Semiconductor Synth... 1
Semiconductor Modeling & Simulat... 1
Signal/Power Management 1
Substrates 1
Synthesis & Verification 1
TCAD-MBPS 1
TM – Thermal Management 1
TT – Test & Testability 1
TechCAD – Technology CAD 1
VER – Verification 1

1 through 30 of 89 similar documents, best matches first.   
Results by:Thunderstone Page: 1 2 3 next >>
1: Langmuir Probe System for Radio Frequency Excited Plasma Processing...
Langmuir Probe System for Radio Frequency Excited Plasma Processing System Application Type: Utility Patent Number: 5339039 Country: United States Status: Filed on 29-Sep-1992, ...
URL: https://www.src.org/library/patent/p0130/
Modified: 1994-08-16 - 22KB
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2: System and Method Converting the Polarization State of an Optical...
System and Method Converting the Polarization State of an Optical Beam into an Inhomogenously Polarized State Application Type: Utility Patent Number: 7414786 Country: United ...
URL: https://www.src.org/library/patent/p0496/
Modified: 2008-08-19 - 24KB
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3: Process for Forming Hafnium Oxide Films (Patent P0235) - SRC
Process for Forming Hafnium Oxide Films Application Type: Utility Patent Number: 6683011 Country: United States Status: Filed on 14-Nov-2001, Issued on 27-Jan-2004, Patent Expired ...
URL: https://www.src.org/library/patent/p0235/
Modified: 2004-01-27 - 22KB
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4: Method for Testing and Diagnosing MOS Transistors (Patent P0188...
Method for Testing and Diagnosing MOS Transistors Application Type: Utility Patent Number: 6275059 Country: United States Status: Filed on 4-Oct-1999, Issued on 14-Aug-2001, Patent ...
URL: https://www.src.org/library/patent/p0188/
Modified: 2001-08-14 - 22KB
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5: Scanning Probe Characterization of Surfaces (Patent P0618) -...
Scanning Probe Characterization of Surfaces Application Type: Utility Patent Number: 7420106 Country: United States Status: Filed on 15-Mar-2006, Issued on 2-Sep-2008, Patent ...
URL: https://www.src.org/library/patent/p0618/
Modified: 2008-09-02 - 22KB
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6: Surface Modifcation of CVD Polymer Films (Patent P0591) - SRC
Surface Modifcation of CVD Polymer Films Application Type: Utility Patent Number: 7501154 Country: United States Status: Filed on 18-Feb-2005, Issued on 10-Mar-2009 Organization: ...
URL: https://www.src.org/library/patent/p0591/
Modified: 2009-03-10 - 22KB
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7: High Gain Integrated Antenna and Devices Therefrom (Patent P0392...
High Gain Integrated Antenna and Devices Therefrom Application Type: Utility Patent Number: 6842144 Country: United States Status: Filed on 10-Jun-2003, Issued on 11-Jan-2005, ...
URL: https://www.src.org/library/patent/p0392/
Modified: 2005-01-11 - 22KB
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8: Films for Use in Microelectronic Devices and Methods of Producing...
Films for Use in Microelectronic Devices and Methods of Producing Same Application Type: Utility Patent Number: 6306495 Country: United States Status: Filed on 27-Jul-2000, Issued ...
URL: https://www.src.org/library/patent/p0156/
Modified: 2001-10-23 - 22KB
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9: Films for Use in Microelectronic Devices and Methods of Producing...
Films for Use in Microelectronic Devices and Methods of Producing Same Application Type: Utility Patent Number: 6114032 Country: United States Status: Filed on 10-Apr-1998, Issued ...
URL: https://www.src.org/library/patent/p0155/
Modified: 2000-09-05 - 22KB
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10: Methods for Removing Contaminants on a Substrate (Patent P0252...
Methods for Removing Contaminants on a Substrate Application Type: Utility Patent Number: 6933235 Country: United States Status: Filed on 21-Nov-2002, Issued on 23-Aug-2005, Patent ...
URL: https://www.src.org/library/patent/p0252/
Modified: 2005-08-23 - 22KB
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11: Apparatus for Production of an Inhomogeneously Polarized Optical...
Apparatus for Production of an Inhomogeneously Polarized Optical Beam for Use in Illumination and a Method Thereof Application Type: Utility Patent Number: 7151632 Country: United ...
URL: https://www.src.org/library/patent/p0203/
Modified: 2006-12-19 - 22KB
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12: Solventless, Resistless, Direct Dielectric Patterning (Patent...
Solventless, Resistless, Direct Dielectric Patterning Application Type: European Patent Office Patent Number: 1269259 Status: Filed on 11-Jan-2001, Issued on 8-Aug-2012, Patent ...
URL: https://www.src.org/library/patent/p0308/
Modified: 2012-08-08 - 22KB
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13: Method for Patterning a Radiation Sensitive Layer (Patent P0087...
Method for Patterning a Radiation Sensitive Layer Application Type: Utility Patent Number: 6509138 Country: United States Status: Filed on 12-Jan-2000, Issued on 21-Jan-2003 ...
URL: https://www.src.org/library/patent/p0087/
Modified: 2003-01-21 - 22KB
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14: Solventless, Resistless, Direct Dielectric Patterning (Patent...
Solventless, Resistless, Direct Dielectric Patterning Application Type: Foreign National Patent Number: 171285 Country: Taiwan Status: Filed on 9-Jan-2001, Issued on 2-Jun-2003, ...
URL: https://www.src.org/library/patent/p0207/
Modified: 2003-06-02 - 22KB
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15: Conductors Created by Metal Deposition Using Selective Passivation...
Conductors Created by Metal Deposition Using Selective Passivation Layer and Related Methods Application Type: Utility Patent Number: 7534967 Country: United States Status: Filed ...
URL: https://www.src.org/library/patent/p0447/
Modified: 2009-05-19 - 23KB
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16: Patterning Methods and Systems Using Reflected Interference Patterns...
Patterning Methods and Systems Using Reflected Interference Patterns Application Type: Continuation Patent Number: 6967067 Country: United States Status: Filed on 9-Mar-2004, ...
URL: https://www.src.org/library/patent/p0428/
Modified: 2005-11-22 - 22KB
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17: Patterning Methods and Systems Using Reflected Interference Patterns...
Patterning Methods and Systems Using Reflected Interference Patterns Application Type: Utility Patent Number: 6730443 Country: United States Status: Filed on 12-Feb-2001, Issued on ...
URL: https://www.src.org/library/patent/p0195/
Modified: 2004-05-04 - 22KB
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18: Patterning Methods and Systems Using Reflected Interference Patterns...
Patterning Methods and Systems Using Reflected Interference Patterns Application Type: Foreign National Patent Number: NI-154578 Country: Taiwan Status: Filed on 21-Feb-2001, ...
URL: https://www.src.org/library/patent/p0267/
Modified: 2002-05-01 - 22KB
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19: Systems, Methods and Computer Program Products for Detecting...
Systems, Methods and Computer Program Products for Detecting the Position of a New Alignment Mark on a Substrate Based on Fitting to Sample Alignment Signals Application Type: ...
URL: https://www.src.org/library/patent/p0047/
Modified: 2000-05-16 - 22KB
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20: Growth of Inorganic Thin Films using Self-Assembled Monolayers...
Growth of Inorganic Thin Films using Self-Assembled Monolayers as Nucleation Sites Application Type: Utility Patent Number: 7829150 Country: United States Status: Filed on ...
URL: https://www.src.org/library/patent/p1139/
Modified: 2010-11-09 - 22KB
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21: Methods and Systems for Transmission and Detection of Free Radicals...
Methods and Systems for Transmission and Detection of Free Radicals Application Type: Utility Patent Number: 11592394 Country: United States Status: Filed on 14-Aug-2017, Issued on ...
URL: https://www.src.org/library/patent/p2131/
Modified: 2023-12-28 - 22KB
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22: Oxidation Resistant High Conductivity Copper Layers For Microelectroni...
Oxidation Resistant High Conductivity Copper Layers For Microelectronic Applications and Process of Making Same Application Type: Divisional Patent Number: 5959358 Country: United ...
URL: https://www.src.org/library/patent/p0054/
Modified: 1999-09-28 - 24KB
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23: Passivated Copper Conductive Layers for Microelectronic Applications...
Passivated Copper Conductive Layers for Microelectronic Applications and Methods of Manufacturing Same Application Type: Utility Patent Number: 5766379 Country: United States ...
URL: https://www.src.org/library/patent/p0015/
Modified: 1998-06-16 - 24KB
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24: Molecular Transfer Printing Using Block Copolymers (Patent P1163...
Molecular Transfer Printing Using Block Copolymers Application Type: Utility Patent Number: 8133341 Country: United States Status: Filed on 1-Apr-2009, Issued on 13-Mar-2012, ...
URL: https://www.src.org/library/patent/p1163/
Modified: 2012-03-13 - 26KB
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25: Molecular Transfer Printing Using Block Copolymers (Patent P1181...
Molecular Transfer Printing Using Block Copolymers Application Type: Patent Cooperation Treaty Patent Number: PCT/US20090392 Status: Filed on 14-May-2009, Issued on 26-Feb-2011, ...
URL: https://www.src.org/library/patent/p1181/
Modified: 2011-02-26 - 26KB
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26: Molecular Glass Photoresists (Patent P0566) - SRC
Molecular Glass Photoresists Application Type: Utility Patent Number: 7452658 Country: United States Status: Filed on 16-Feb-2006, Issued on 18-Nov-2008, Patent Abandoned ...
URL: https://www.src.org/library/patent/p0566/
Modified: 2008-11-18 - 23KB
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27: Using Block Copolymers as Supercritical Fluid Developable Photoresists...
Using Block Copolymers as Supercritical Fluid Developable Photoresists Application Type: Utility Patent Number: 6379874 Country: United States Status: Filed on 26-Oct-1999, Issued ...
URL: https://www.src.org/library/patent/p0097/
Modified: 2002-04-30 - 22KB
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28: Multiple-Thickness Gate Oxide Formed by Oxygen Implantation ...
Multiple-Thickness Gate Oxide Formed by Oxygen Implantation - device claims Application Type: Utility Patent Number: 6855994 Country: United States Status: Filed on 5-Sep-2001, ...
URL: https://www.src.org/library/patent/p0259/
Modified: 2005-02-15 - 26KB
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29: Multiple-Thickness Gate Oxide Formed by Oxygen Implantation ...
Multiple-Thickness Gate Oxide Formed by Oxygen Implantation - Method claims Application Type: Utility Patent Number: 6753229 Country: United States Status: Filed on 24-Nov-1999, ...
URL: https://www.src.org/library/patent/p0086/
Modified: 2004-06-22 - 26KB
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30: Multiple-Thickness Gate Oxide Formed by Oxygen Implantation ...
Multiple-Thickness Gate Oxide Formed by Oxygen Implantation Application Type: Foreign National Patent Number: NI154458 Country: Taiwan Status: Filed on 1-Dec-1999, Issued on ...
URL: https://www.src.org/library/patent/p0211/
Modified: 2003-05-07 - 26KB
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1 through 30 of 89 similar documents, best matches first.   
Results by:Thunderstone Page: 1 2 3 next >>