[x]
Thrust/Theme
[x]
GRC Science Area
| Content Type |
| Patent Filings | 1 |
| SRC Program |
| GRC | 1 |
| 1 through 1 of 1 similar documents, best matches first. | ||
- 1: Selective Low Temperature Chemical Vapor Deposition of Titanium...
- Selective Low Temperature Chemical Vapor Deposition of Titanium Disilicide onto Silicon Regions Application Type: Utility Patent Number: 5633036 Country: United States Status: ...
URL: https://www.src.org/library/patent/p0055/
Modified: 1997-05-27 - 21KB
Find Similar Documents