Questions?
[x] SRC Program
GRC

[x] GRC Science Area
LIT – Lithography Sciences

Content Type
Patent Filings 1

Thrust/Theme
Metrology 1

1 through 1 of 1 similar documents, best matches first.   
1: Method and Apparatus for Real-Time Speckle Interferometry for...
Method and Apparatus for Real-Time Speckle Interferometry for Strain or Displacement of an Object Surface Application Type: Utility Patent Number: 5426498 Country: United States ...
URL: https://www.src.org/library/patent/p0038/
Modified: 1995-06-20 - 21KB
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