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GRC Science Area
LIT – Lithography Sciences
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1 through 23 of
23 similar documents, best matches first. |
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- 1:
Multiple-Thickness Gate Oxide Formed by Oxygen Implantation ...
- Multiple-Thickness Gate Oxide Formed by Oxygen Implantation - Method claims Application Type: Utility Patent Number: 6753229 Country: United States Status: Filed on 24-Nov-1999, ...
URL: https://www.src.org/library/patent/p0086/
Modified: 2004-06-22 - 26KB Find Similar Documents
- 2:
Multi-Layered Attenuated Phase Shift Mask and a Method for Making...
- Multi-Layered Attenuated Phase Shift Mask and a Method for Making the Mask Application Type: Utility Patent Number: 5939227 Country: United States Status: Filed on 9-Mar-1998, ...
URL: https://www.src.org/library/patent/p0052/
Modified: 1999-08-17 - 30KB Find Similar Documents
- 3:
Patterning Methods and Systems Using Reflected Interference Patterns...
- Patterning Methods and Systems Using Reflected Interference Patterns Application Type: Continuation Patent Number: 6967067 Country: United States Status: Filed on 9-Mar-2004, ...
URL: https://www.src.org/library/patent/p0428/
Modified: 2005-11-22 - 22KB Find Similar Documents
- 4:
Modification of Polyvinylidene Fluoride Membrane and Method of...
- Modification of Polyvinylidene Fluoride Membrane and Method of Filtering Application Type: Utility Patent Number: 5531900 Country: United States Status: Filed on 7-Jul-1994, Issued ...
URL: https://www.src.org/library/patent/p0020/
Modified: 1996-07-02 - 22KB Find Similar Documents
- 5:
Attenuated Phase Shift Mask and a Method for Making the Mask...
- Attenuated Phase Shift Mask and a Method for Making the Mask Application Type: Utility Patent Number: 6309780 Country: United States Status: Filed on 15-Jun-1999, Issued on ...
URL: https://www.src.org/library/patent/p0380/
Modified: 2001-10-30 - 22KB Find Similar Documents
- 6:
Patterning Methods and Systems Using Reflected Interference Patterns...
- Patterning Methods and Systems Using Reflected Interference Patterns Application Type: Foreign National Patent Number: NI-154578 Country: Taiwan Status: Filed on 21-Feb-2001, ...
URL: https://www.src.org/library/patent/p0267/
Modified: 2002-05-01 - 22KB Find Similar Documents
- 7:
Patterning Methods and Systems Using Reflected Interference Patterns...
- Patterning Methods and Systems Using Reflected Interference Patterns Application Type: Utility Patent Number: 6730443 Country: United States Status: Filed on 12-Feb-2001, Issued on ...
URL: https://www.src.org/library/patent/p0195/
Modified: 2004-05-04 - 22KB Find Similar Documents
- 8:
Methods and Compositions for Imaging Acids in Chemically Amplified...
- Methods and Compositions for Imaging Acids in Chemically Amplified Photoresists Using pH-Dependent Fluorophores Application Type: Divisional Patent Number: 6566030 Country: United ...
URL: https://www.src.org/library/patent/p0224/
Modified: 2003-05-20 - 23KB Find Similar Documents
- 9:
Methods and Compositions for Imaging Acids in Chemically Amplified...
- Methods and Compositions for Imaging Acids in Chemically Amplified Photoresists Using pH-Dependent Fluorophores Application Type: Utility Patent Number: 6376149 Country: United ...
URL: https://www.src.org/library/patent/p0088/
Modified: 2002-04-23 - 23KB Find Similar Documents
- 10:
Twin Mask, and Method and System for Using Same to Pattern Microelectr...
- Twin Mask, and Method and System for Using Same to Pattern Microelectronic Substrates Application Type: Utility Patent Number: 5438204 Country: United States Status: Filed on ...
URL: https://www.src.org/library/patent/p0034/
Modified: 1995-08-01 - 22KB Find Similar Documents
- 11:
Methods for Decreasing Surface Roughness in Novolak-Based Resists...
- Methods for Decreasing Surface Roughness in Novolak-Based Resists Application Type: Utility Patent Number: 6162592 Country: United States Status: Filed on 6-Oct-1998, Issued on ...
URL: https://www.src.org/library/patent/p0164/
Modified: 2000-12-19 - 22KB Find Similar Documents
- 12:
Method and Apparatus for Providing Film Stress Measurements Based...
- Method and Apparatus for Providing Film Stress Measurements Based on Substrates Displacement Application Type: Utility Patent Number: 6826491 Country: United States Status: Filed ...
URL: https://www.src.org/library/patent/p0209/
Modified: 2004-11-30 - 22KB Find Similar Documents
- 13:
Carbon Nanotubes and Methods of Fabrication Thereof Using a Liquid...
- Carbon Nanotubes and Methods of Fabrication Thereof Using a Liquid Phase Catalyst Precursor Application Type: Utility Patent Number: 6401526 Country: United States Status: Filed on ...
URL: https://www.src.org/library/patent/p0266/
Modified: 2002-06-11 - 22KB Find Similar Documents
- 14:
Reactive Membrane for Filtration and Purification of Gases of...
- Reactive Membrane for Filtration and Purification of Gases of Impurities and Method Utilizing the Same Application Type: Divisional Patent Number: 5635148 Country: United States ...
URL: https://www.src.org/library/patent/p0009/
Modified: 1997-06-03 - 25KB Find Similar Documents
- 15:
Methods, Apparatus and Computer Program Products for Self-Calibrating...
- Methods, Apparatus and Computer Program Products for Self-Calibrating Two-Dimensional Metrology Stages Application Type: Utility Patent Number: 5798947 Country: United States ...
URL: https://www.src.org/library/patent/p0017/
Modified: 1998-08-25 - 22KB Find Similar Documents
- 16:
Apparatus and Method for Shaping and Detecting a Particle Beam...
- Apparatus and Method for Shaping and Detecting a Particle Beam Application Type: Utility Patent Number: 5270542 Country: United States Status: Filed on 31-Dec-1992, Issued on ...
URL: https://www.src.org/library/patent/p0197/
Modified: 1993-12-14 - 22KB Find Similar Documents
- 17:
Reactive Membrane for Filtration and Purification of Gases of...
- Reactive Membrane for Filtration and Purification of Gases of Impurities and Method Utilizing the Same Application Type: Continuation (in part) Patent Number: 5637544 Country: ...
URL: https://www.src.org/library/patent/p0011/
Modified: 1997-06-10 - 25KB Find Similar Documents
- 18:
Method of Locating Areas in an Image Such as a Photo Mask Layout...
- Method of Locating Areas in an Image Such as a Photo Mask Layout That Are Sensitive to Residual Processing Effects Application Type: Continuation (in part) Patent Number: 7155698 ...
URL: https://www.src.org/library/patent/p0409/
Modified: 2006-12-26 - 22KB Find Similar Documents
- 19:
Systems, Methods and Computer Program Products for Detecting...
- Systems, Methods and Computer Program Products for Detecting the Position of a New Alignment Mark on a Substrate Based on Fitting to Sample Alignment Signals Application Type: ...
URL: https://www.src.org/library/patent/p0047/
Modified: 2000-05-16 - 22KB Find Similar Documents
- 20:
Method and Apparatus for Real-Time Speckle Interferometry for...
- Method and Apparatus for Real-Time Speckle Interferometry for Strain or Displacement of an Object Surface Application Type: Utility Patent Number: 5426498 Country: United States ...
URL: https://www.src.org/library/patent/p0038/
Modified: 1995-06-20 - 21KB Find Similar Documents
- 21:
Multiple-Thickness Gate Oxide Formed by Oxygen Implantation ...
- Multiple-Thickness Gate Oxide Formed by Oxygen Implantation - device claims Application Type: Utility Patent Number: 6855994 Country: United States Status: Filed on 5-Sep-2001, ...
URL: https://www.src.org/library/patent/p0259/
Modified: 2005-02-15 - 26KB Find Similar Documents
- 22:
Multiple-Thickness Gate Oxide Formed by Oxygen Implantation ...
- Multiple-Thickness Gate Oxide Formed by Oxygen Implantation Application Type: Foreign National Patent Number: NI154458 Country: Taiwan Status: Filed on 1-Dec-1999, Issued on ...
URL: https://www.src.org/library/patent/p0211/
Modified: 2003-05-07 - 26KB Find Similar Documents
- 23:
Semiconductor Research Corporation - SRC
- GRC GRC Global Research Collaboration Our motivation is to fund the most relevant and critical research for international companies, so we go where the best university talent ...
URL: https://www.src.org/program/grc/
Modified: 2023-10-10 - 33KB Find Similar Documents
1 through 23 of
23 similar documents, best matches first. |
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