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MPS – Material & Process Sciences

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119

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PAT – Patterning	23
Factory Systems	17
Pat(MPS) – Patterning	15
BEP – Back End Processes	7
Back End Processes	7
ESH – Environment Safety and Hea...	3
DCMOS – Digital CMOS Technologie...	2
PatMat – Patterning Materials	2
CFM&TCM – CFM & Total Chemical M...	1
Doping Technologies	1
Front End Processes	1
Materials	1

1 through 30 of 119 similar documents, best matches first.

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1: Solventless, Resistless, Direct Dielectric Patterning (Patent...: Solventless, Resistless, Direct Dielectric Patterning Application Type: European Patent Office Patent Number: 1269259 Status: Filed on 11-Jan-2001, Issued on 8-Aug-2012, Patent ...
URL: https://www.src.org/library/patent/p0308/
Modified: 2012-08-08 - 22KB
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2: Scanning Probe Characterization of Surfaces (Patent P0618) -...: Scanning Probe Characterization of Surfaces Application Type: Utility Patent Number: 7420106 Country: United States Status: Filed on 15-Mar-2006, Issued on 2-Sep-2008, Patent ...
URL: https://www.src.org/library/patent/p0618/
Modified: 2008-09-02 - 22KB
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3: Process for Forming Hafnium Oxide Films (Patent P0235) - SRC: Process for Forming Hafnium Oxide Films Application Type: Utility Patent Number: 6683011 Country: United States Status: Filed on 14-Nov-2001, Issued on 27-Jan-2004, Patent Expired ...
URL: https://www.src.org/library/patent/p0235/
Modified: 2004-01-27 - 22KB
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4: Dual Work Function CMOS Gate Technology Based on Metal Interdiffusion...: Dual Work Function CMOS Gate Technology Based on Metal Interdiffusion Application Type: Divisional Patent Number: 7141858 Country: United States Status: Filed on 18-Jun-2004, ...
URL: https://www.src.org/library/patent/p0482/
Modified: 2006-11-28 - 22KB
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5: Dual Work Function CMOS Gate Technology Based on Metal Interdiffusion...: Dual Work Function CMOS Gate Technology Based on Metal Interdiffusion Application Type: Utility Patent Number: 6794234 Country: United States Status: Filed on 9-Dec-2002, Issued on ...
URL: https://www.src.org/library/patent/p0295/
Modified: 2004-09-21 - 22KB
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6: Ultrapure Water Treatment System (Patent P0071) - SRC: Ultrapure Water Treatment System Application Type: Utility Patent Number: 5302356 Country: United States Status: Filed on 4-Mar-1992, Issued on 12-Apr-1994, Patent Expired ...
URL: https://www.src.org/library/patent/p0071/
Modified: 1994-04-12 - 21KB
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7: Solventless, Resistless, Direct Dielectric Patterning (Patent...: Solventless, Resistless, Direct Dielectric Patterning Application Type: Foreign National Patent Number: 171285 Country: Taiwan Status: Filed on 9-Jan-2001, Issued on 2-Jun-2003, ...
URL: https://www.src.org/library/patent/p0207/
Modified: 2003-06-02 - 22KB
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8: Conductors Created by Metal Deposition Using Selective Passivation...: Conductors Created by Metal Deposition Using Selective Passivation Layer and Related Methods Application Type: Utility Patent Number: 7534967 Country: United States Status: Filed ...
URL: https://www.src.org/library/patent/p0447/
Modified: 2009-05-19 - 23KB
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9: System and Method Converting the Polarization State of an Optical...: System and Method Converting the Polarization State of an Optical Beam into an Inhomogenously Polarized State Application Type: Utility Patent Number: 7414786 Country: United ...
URL: https://www.src.org/library/patent/p0496/
Modified: 2008-08-19 - 24KB
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10: High/Low Work Function Metal Alloys for Integrated Circuit Electrodes...: High/Low Work Function Metal Alloys for Integrated Circuit Electrodes and Methods of Fabricating Same Application Type: Utility Patent Number: 6873020 Country: United States ...
URL: https://www.src.org/library/patent/p0243/
Modified: 2005-03-29 - 22KB
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11: Surface Modifcation of CVD Polymer Films (Patent P0591) - SRC: Surface Modifcation of CVD Polymer Films Application Type: Utility Patent Number: 7501154 Country: United States Status: Filed on 18-Feb-2005, Issued on 10-Mar-2009 Organization: ...
URL: https://www.src.org/library/patent/p0591/
Modified: 2009-03-10 - 22KB
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12: Method for Testing and Diagnosing MOS Transistors (Patent P0188...: Method for Testing and Diagnosing MOS Transistors Application Type: Utility Patent Number: 6275059 Country: United States Status: Filed on 4-Oct-1999, Issued on 14-Aug-2001, Patent ...
URL: https://www.src.org/library/patent/p0188/
Modified: 2001-08-14 - 22KB
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13: High Gain Integrated Antenna and Devices Therefrom (Patent P0392...: High Gain Integrated Antenna and Devices Therefrom Application Type: Utility Patent Number: 6842144 Country: United States Status: Filed on 10-Jun-2003, Issued on 11-Jan-2005, ...
URL: https://www.src.org/library/patent/p0392/
Modified: 2005-01-11 - 22KB
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14: Method for Fine-Line Interferometric Lithography (Patent P0041...: Method for Fine-Line Interferometric Lithography Application Type: Utility Patent Number: RE3611 Country: United States Status: Filed on 16-Sep-1992, Issued on 16-May-1995, Patent ...
URL: https://www.src.org/library/patent/p0041/
Modified: 1995-05-16 - 21KB
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15: Methods for Removing Contaminants on a Substrate (Patent P0252...: Methods for Removing Contaminants on a Substrate Application Type: Utility Patent Number: 6933235 Country: United States Status: Filed on 21-Nov-2002, Issued on 23-Aug-2005, Patent ...
URL: https://www.src.org/library/patent/p0252/
Modified: 2005-08-23 - 22KB
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16: Langmuir Probe System for Radio Frequency Excited Plasma Processing...: Langmuir Probe System for Radio Frequency Excited Plasma Processing System Application Type: Utility Patent Number: 5339039 Country: United States Status: Filed on 29-Sep-1992, ...
URL: https://www.src.org/library/patent/p0130/
Modified: 1994-08-16 - 22KB
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17: Method for Patterning a Radiation Sensitive Layer (Patent P0087...: Method for Patterning a Radiation Sensitive Layer Application Type: Utility Patent Number: 6509138 Country: United States Status: Filed on 12-Jan-2000, Issued on 21-Jan-2003 ...
URL: https://www.src.org/library/patent/p0087/
Modified: 2003-01-21 - 22KB
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18: Films for Use in Microelectronic Devices and Methods of Producing...: Films for Use in Microelectronic Devices and Methods of Producing Same Application Type: Utility Patent Number: 6306495 Country: United States Status: Filed on 27-Jul-2000, Issued ...
URL: https://www.src.org/library/patent/p0156/
Modified: 2001-10-23 - 22KB
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19: Films for Use in Microelectronic Devices and Methods of Producing...: Films for Use in Microelectronic Devices and Methods of Producing Same Application Type: Utility Patent Number: 6114032 Country: United States Status: Filed on 10-Apr-1998, Issued ...
URL: https://www.src.org/library/patent/p0155/
Modified: 2000-09-05 - 22KB
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20: Apparatus for Production of an Inhomogeneously Polarized Optical...: Apparatus for Production of an Inhomogeneously Polarized Optical Beam for Use in Illumination and a Method Thereof Application Type: Utility Patent Number: 7151632 Country: United ...
URL: https://www.src.org/library/patent/p0203/
Modified: 2006-12-19 - 22KB
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21: Diffracted Light from Latent Images in Photoresist for Exposure...: Diffracted Light from Latent Images in Photoresist for Exposure Control Application Type: Utility Patent Number: 5674652 Country: United States Status: Filed on 28-Feb-1991, Issued ...
URL: https://www.src.org/library/patent/p0265/
Modified: 1997-10-07 - 21KB
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22: Reactive Membrane for Filtration and Purification of Gases of...: Reactive Membrane for Filtration and Purification of Gases of Impurities Application Type: Utility Patent Number: 5196380 Country: United States Status: Filed on 6-Jun-1991, Issued ...
URL: https://www.src.org/library/patent/p0143/
Modified: 1993-03-23 - 21KB
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23: Method and Apparatus for Alignment and Overlay of Submicron Lithograph...: Method and Apparatus for Alignment and Overlay of Submicron Lithographic Features Application Type: Utility Patent Number: 5216257 Country: United States Status: Filed on ...
URL: https://www.src.org/library/patent/p0136/
Modified: 1993-06-01 - 21KB
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24: Use of Diffracted Light from Latent Images in Photoresist for...: Use of Diffracted Light from Latent Images in Photoresist for Optimizing Image Contrast Application Type: Utility Patent Number: 5830611 Country: United States Status: Filed on ...
URL: https://www.src.org/library/patent/p0254/
Modified: 1998-11-03 - 21KB
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25: Simple CD Measurement of Periodic Structures on Photomasks (Patent...: Simple CD Measurement of Periodic Structures on Photomasks Application Type: Utility Patent Number: 5164790 Country: United States Status: Filed on 27-Feb-1991, Issued on ...
URL: https://www.src.org/library/patent/p0144/
Modified: 1992-11-17 - 21KB
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26: Step and Flash Imprint Lithography (Patent P0264) - SRC: Step and Flash Imprint Lithography Application Type: Utility Patent Number: 6719915 Country: United States Status: Filed on 19-Jul-2001, Issued on 13-Apr-2004 Organization: ...
URL: https://www.src.org/library/patent/p0264/
Modified: 2004-04-13 - 25KB
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27: Step and Flash Imprint Lithography (Patent P0245) - SRC: Step and Flash Imprint Lithography Application Type: European Patent Office Patent Number: 1228401 Status: Filed on 3-Mar-2000, Issued on 10-Aug-2005 Organization: University of ...
URL: https://www.src.org/library/patent/p0245/
Modified: 2005-08-10 - 25KB
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28: Step and Flash Imprint Lithography (Patent P0238) - SRC: Step and Flash Imprint Lithography Application Type: Utility Patent Number: 6334960 Country: United States Status: Filed on 11-Mar-1999, Issued on 1-Jan-2002, Patent Expired ...
URL: https://www.src.org/library/patent/p0238/
Modified: 2002-01-01 - 25KB
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29: Step and Flash Imprint Lithography (Patent P0233) - SRC: Step and Flash Imprint Lithography Application Type: Foreign National Patent Number: WO2000054107 A Country: Japan Status: Filed on 3-Mar-2000, Issued on 2-May-2000, Patent Expired ...
URL: https://www.src.org/library/patent/p0233/
Modified: 2000-05-02 - 25KB
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30: Optical Proximity Correction Using Regression (Patent P1118)...: Optical Proximity Correction Using Regression Application Type: Utility Patent Number: 8201110 Country: United States Status: Filed on 14-Apr-2009, Issued on 12-Jun-2012, Patent ...
URL: https://www.src.org/library/patent/p1118/
Modified: 2012-06-12 - 24KB
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1 through 30 of 119 similar documents, best matches first.

Results by:	Page: 1 2 3 4	next >>