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GRC Science Area
MPS – Material & Process Sciences
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- 1:
High Gain Integrated Antenna and Devices Therefrom (Patent P0392...
- High Gain Integrated Antenna and Devices Therefrom Application Type: Utility Patent Number: 6842144 Country: United States Status: Filed on 10-Jun-2003, Issued on 11-Jan-2005, ...
URL: https://www.src.org/library/patent/p0392/
Modified: 2005-01-11 - 22KB
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- 2:
Diffracted Light from Latent Images in Photoresist for Exposure...
- Diffracted Light from Latent Images in Photoresist for Exposure Control Application Type: Utility Patent Number: 5674652 Country: United States Status: Filed on 28-Feb-1991, Issued ...
URL: https://www.src.org/library/patent/p0265/
Modified: 1997-10-07 - 21KB
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- 3:
Scanning Probe Characterization of Surfaces (Patent P0618) -...
- Scanning Probe Characterization of Surfaces Application Type: Utility Patent Number: 7420106 Country: United States Status: Filed on 15-Mar-2006, Issued on 2-Sep-2008, Patent ...
URL: https://www.src.org/library/patent/p0618/
Modified: 2008-09-02 - 22KB
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- 4:
Method for Fine-Line Interferometric Lithography (Patent P0041...
- Method for Fine-Line Interferometric Lithography Application Type: Utility Patent Number: RE3611 Country: United States Status: Filed on 16-Sep-1992, Issued on 16-May-1995, Patent ...
URL: https://www.src.org/library/patent/p0041/
Modified: 1995-05-16 - 21KB
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- 5:
Method and Apparatus for Alignment and Overlay of Submicron Lithograph...
- Method and Apparatus for Alignment and Overlay of Submicron Lithographic Features Application Type: Utility Patent Number: 5216257 Country: United States Status: Filed on ...
URL: https://www.src.org/library/patent/p0136/
Modified: 1993-06-01 - 21KB
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- 6:
Use of Diffracted Light from Latent Images in Photoresist for...
- Use of Diffracted Light from Latent Images in Photoresist for Optimizing Image Contrast Application Type: Utility Patent Number: 5830611 Country: United States Status: Filed on ...
URL: https://www.src.org/library/patent/p0254/
Modified: 1998-11-03 - 21KB
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