Questions?
[x] SRC Program
GRC

[x] GRC Science Area
DS – Device Sciences

[x] Thrust/Theme
Lithography

Content Type
Patent Filings 1

1 through 1 of 1 similar documents, best matches first.   
1: Method of Making Microelectronic Structures Utilizing Photoresists...
Method of Making Microelectronic Structures Utilizing Photoresists Containing C3C12 Water Soluble Suguar Crosslinking Agents Application Type: Divisional Patent Number: 5532113 ...
URL: https://www.src.org/library/patent/p0021/
Modified: 1996-07-02 - 21KB
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