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Thrust/Theme
| Content Type |
| Patent Filings | 1 |
| SRC Program |
| GRC | 1 |
| GRC Science Area |
| DS – Device Sciences | 1 |
| MIC – Microstructure Sciences | 1 |
| 1 through 1 of 1 similar documents, best matches first. | ||
- 1: Selective Low Temperature Chemical Vapor Deposition of Titanium...
- Selective Low Temperature Chemical Vapor Deposition of Titanium Disilicide onto Silicon Regions Application Type: Utility Patent Number: 5633036 Country: United States Status: ...
URL: https://www.src.org/library/patent/p0055/
Modified: 1997-05-27 - 21KB
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