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| 1 through 30 of 106 similar documents, best matches first. | ||
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- 1: Fluorine Diffusion Barriers for Fuorinated Dielectrics in Integrated...
- Fluorine Diffusion Barriers for Fuorinated Dielectrics in Integrated Circuits Application Type: Utility Patent Number: 6818990 Country: United States Status: Filed on 3-Apr-2000, ...
URL: https://www.src.org/library/patent/p0589/
Modified: 2004-11-16 - 22KB
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- 2: Method of Forming Boron Carbo-Nitride Layers for Integrated Circuit...
- Method of Forming Boron Carbo-Nitride Layers for Integrated Circuit Devices Application Type: Utility Patent Number: 7144803 Country: United States Status: Filed on 16-Apr-2004, ...
URL: https://www.src.org/library/patent/p0451/
Modified: 2006-12-05 - 22KB
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- 3: Multiple Copper Vias for Integrated Circuit Metallization and...
- Multiple Copper Vias for Integrated Circuit Metallization and Methods of Fabricating Same Application Type: Utility Patent Number: 6919639 Country: United States Status: Filed on ...
URL: https://www.src.org/library/patent/p0268/
Modified: 2005-07-19 - 22KB
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- 4: CHARACTERIZING ABERRATIONS IN AN IMAGING LENS AND APPLICATIONS...
- CHARACTERIZING ABERRATIONS IN AN IMAGING LENS AND APPLICATIONS TO VISUAL TESTING AND INTEGRATED CIRCUIT MASK ANALYSIS Application Type: Utility Patent Number: 7030997 Country: ...
URL: https://www.src.org/library/patent/p0302/
Modified: 2006-04-18 - 22KB
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- 5: High/Low Work Function Metal Alloys for Integrated Circuit Electrodes...
- High/Low Work Function Metal Alloys for Integrated Circuit Electrodes and Methods of Fabricating Same Application Type: Utility Patent Number: 6873020 Country: United States ...
URL: https://www.src.org/library/patent/p0243/
Modified: 2005-03-29 - 22KB
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- 6: Conductors Created by Metal Deposition Using Selective Passivation...
- Conductors Created by Metal Deposition Using Selective Passivation Layer and Related Methods Application Type: Utility Patent Number: 7534967 Country: United States Status: Filed ...
URL: https://www.src.org/library/patent/p0447/
Modified: 2009-05-19 - 23KB
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- 7: Lanthanum Oxide-Based Gate Dielectrics for Integrated Circuit...
- Lanthanum Oxide-Based Gate Dielectrics for Integrated Circuit Field Effect Transistors and Methods of Fabricating Same Application Type: Divisional Patent Number: 6753567 Country: ...
URL: https://www.src.org/library/patent/p0375/
Modified: 2004-06-22 - 22KB
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- 8: Lanthanum Oxide-Based Gate Dielectrics for Integrated Circuit...
- Lanthanum Oxide-Based Gate Dielectrics for Integrated Circuit Field Effect Transistors and Methods of Fabricating Same Application Type: Utility Patent Number: 6531354 Country: ...
URL: https://www.src.org/library/patent/p0194/
Modified: 2003-03-11 - 22KB
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- 9: Scanning Probe Characterization of Surfaces (Patent P0618) -...
- Scanning Probe Characterization of Surfaces Application Type: Utility Patent Number: 7420106 Country: United States Status: Filed on 15-Mar-2006, Issued on 2-Sep-2008, Patent ...
URL: https://www.src.org/library/patent/p0618/
Modified: 2008-09-02 - 22KB
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- 10: Langmuir Probe System for Radio Frequency Excited Plasma Processing...
- Langmuir Probe System for Radio Frequency Excited Plasma Processing System Application Type: Utility Patent Number: 5339039 Country: United States Status: Filed on 29-Sep-1992, ...
URL: https://www.src.org/library/patent/p0130/
Modified: 1994-08-16 - 22KB
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- 11: Method for Testing and Diagnosing MOS Transistors (Patent P0188...
- Method for Testing and Diagnosing MOS Transistors Application Type: Utility Patent Number: 6275059 Country: United States Status: Filed on 4-Oct-1999, Issued on 14-Aug-2001, Patent ...
URL: https://www.src.org/library/patent/p0188/
Modified: 2001-08-14 - 22KB
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- 12: High Gain Integrated Antenna and Devices Therefrom (Patent P0392...
- High Gain Integrated Antenna and Devices Therefrom Application Type: Utility Patent Number: 6842144 Country: United States Status: Filed on 10-Jun-2003, Issued on 11-Jan-2005, ...
URL: https://www.src.org/library/patent/p0392/
Modified: 2005-01-11 - 22KB
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- 13: System and Method Converting the Polarization State of an Optical...
- System and Method Converting the Polarization State of an Optical Beam into an Inhomogenously Polarized State Application Type: Utility Patent Number: 7414786 Country: United ...
URL: https://www.src.org/library/patent/p0496/
Modified: 2008-08-19 - 24KB
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- 14: Diffracted Light from Latent Images in Photoresist for Exposure...
- Diffracted Light from Latent Images in Photoresist for Exposure Control Application Type: Utility Patent Number: 5674652 Country: United States Status: Filed on 28-Feb-1991, Issued ...
URL: https://www.src.org/library/patent/p0265/
Modified: 1997-10-07 - 21KB
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- 15: Method for Fine-Line Interferometric Lithography (Patent P0041...
- Method for Fine-Line Interferometric Lithography Application Type: Utility Patent Number: RE3611 Country: United States Status: Filed on 16-Sep-1992, Issued on 16-May-1995, Patent ...
URL: https://www.src.org/library/patent/p0041/
Modified: 1995-05-16 - 21KB
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- 16: Process for Forming Hafnium Oxide Films (Patent P0235) - SRC
- Process for Forming Hafnium Oxide Films Application Type: Utility Patent Number: 6683011 Country: United States Status: Filed on 14-Nov-2001, Issued on 27-Jan-2004, Patent Expired ...
URL: https://www.src.org/library/patent/p0235/
Modified: 2004-01-27 - 22KB
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- 17: Ultrapure Water Treatment System (Patent P0071) - SRC
- Ultrapure Water Treatment System Application Type: Utility Patent Number: 5302356 Country: United States Status: Filed on 4-Mar-1992, Issued on 12-Apr-1994, Patent Expired ...
URL: https://www.src.org/library/patent/p0071/
Modified: 1994-04-12 - 21KB
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- 18: Use of Diffracted Light from Latent Images in Photoresist for...
- Use of Diffracted Light from Latent Images in Photoresist for Optimizing Image Contrast Application Type: Utility Patent Number: 5830611 Country: United States Status: Filed on ...
URL: https://www.src.org/library/patent/p0254/
Modified: 1998-11-03 - 21KB
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- 19: Methods for Removing Contaminants on a Substrate (Patent P0252...
- Methods for Removing Contaminants on a Substrate Application Type: Utility Patent Number: 6933235 Country: United States Status: Filed on 21-Nov-2002, Issued on 23-Aug-2005, Patent ...
URL: https://www.src.org/library/patent/p0252/
Modified: 2005-08-23 - 22KB
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- 20: Apparatus for Production of an Inhomogeneously Polarized Optical...
- Apparatus for Production of an Inhomogeneously Polarized Optical Beam for Use in Illumination and a Method Thereof Application Type: Utility Patent Number: 7151632 Country: United ...
URL: https://www.src.org/library/patent/p0203/
Modified: 2006-12-19 - 22KB
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- 21: Reactive Membrane for Filtration and Purification of Gases of...
- Reactive Membrane for Filtration and Purification of Gases of Impurities Application Type: Utility Patent Number: 5196380 Country: United States Status: Filed on 6-Jun-1991, Issued ...
URL: https://www.src.org/library/patent/p0143/
Modified: 1993-03-23 - 21KB
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- 22: Films for Use in Microelectronic Devices and Methods of Producing...
- Films for Use in Microelectronic Devices and Methods of Producing Same Application Type: Utility Patent Number: 6306495 Country: United States Status: Filed on 27-Jul-2000, Issued ...
URL: https://www.src.org/library/patent/p0156/
Modified: 2001-10-23 - 22KB
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- 23: Films for Use in Microelectronic Devices and Methods of Producing...
- Films for Use in Microelectronic Devices and Methods of Producing Same Application Type: Utility Patent Number: 6114032 Country: United States Status: Filed on 10-Apr-1998, Issued ...
URL: https://www.src.org/library/patent/p0155/
Modified: 2000-09-05 - 22KB
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- 24: Method and Apparatus for Alignment and Overlay of Submicron Lithograph...
- Method and Apparatus for Alignment and Overlay of Submicron Lithographic Features Application Type: Utility Patent Number: 5216257 Country: United States Status: Filed on ...
URL: https://www.src.org/library/patent/p0136/
Modified: 1993-06-01 - 21KB
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- 25: Simple CD Measurement of Periodic Structures on Photomasks (Patent...
- Simple CD Measurement of Periodic Structures on Photomasks Application Type: Utility Patent Number: 5164790 Country: United States Status: Filed on 27-Feb-1991, Issued on ...
URL: https://www.src.org/library/patent/p0144/
Modified: 1992-11-17 - 21KB
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- 26: Surface Modifcation of CVD Polymer Films (Patent P0591) - SRC
- Surface Modifcation of CVD Polymer Films Application Type: Utility Patent Number: 7501154 Country: United States Status: Filed on 18-Feb-2005, Issued on 10-Mar-2009 Organization: ...
URL: https://www.src.org/library/patent/p0591/
Modified: 2009-03-10 - 22KB
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- 27: Method for Patterning a Radiation Sensitive Layer (Patent P0087...
- Method for Patterning a Radiation Sensitive Layer Application Type: Utility Patent Number: 6509138 Country: United States Status: Filed on 12-Jan-2000, Issued on 21-Jan-2003 ...
URL: https://www.src.org/library/patent/p0087/
Modified: 2003-01-21 - 22KB
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- 28: Molecular Glass Photoresists (Patent P0566) - SRC
- Molecular Glass Photoresists Application Type: Utility Patent Number: 7452658 Country: United States Status: Filed on 16-Feb-2006, Issued on 18-Nov-2008, Patent Abandoned ...
URL: https://www.src.org/library/patent/p0566/
Modified: 2008-11-18 - 23KB
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- 29: Supermolecular Structures and Devices Made From Same (Patent...
- Supermolecular Structures and Devices Made From Same Application Type: Continuation Patent Number: 6897470 Country: United States Status: Filed on 14-Oct-2003, Issued on ...
URL: https://www.src.org/library/patent/p0425/
Modified: 2005-05-24 - 25KB
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- 30: Supermolecular Structures and Devices Made from Same (Patent...
- Supermolecular Structures and Devices Made from Same Application Type: Utility Patent Number: 6664559 Country: United States Status: Filed on 23-Feb-2000, Issued on 16-Dec-2003, ...
URL: https://www.src.org/library/patent/p0165/
Modified: 2003-12-16 - 25KB
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