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DS – Device Sciences
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Selective Low Temperature Chemical Vapor Deposition of Titanium...
- Selective Low Temperature Chemical Vapor Deposition of Titanium Disilicide onto Silicon Regions Application Type: Utility Patent Number: 5633036 Country: United States Status: ...
URL: https://www.src.org/library/patent/p0055/
Modified: 1997-05-27 - 21KB Find Similar Documents
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