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| GRC Science Area |
| MPS – Material & Process Science... | 3 |
| LIT – Lithography Sciences | 1 |
| 1 through 3 of 3 similar documents, best matches first. | ||
- 1: Micromachines Scanning Thermal Probe Method and Apparatus (Patent...
- Micromachines Scanning Thermal Probe Method and Apparatus Application Type: Utility Patent Number: 6692145 Country: United States Status: Filed on 31-Oct-2001, Issued on ...
URL: https://www.src.org/library/patent/p0244/
Modified: 2004-02-17 - 22KB
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- 2: Method and Apparatus for Providing Film Stress Measurements Based...
- Method and Apparatus for Providing Film Stress Measurements Based on Substrates Displacement Application Type: Utility Patent Number: 6826491 Country: United States Status: Filed ...
URL: https://www.src.org/library/patent/p0209/
Modified: 2004-11-30 - 22KB
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- 3: Apparatus for Production of an Inhomogeneously Polarized Optical...
- Apparatus for Production of an Inhomogeneously Polarized Optical Beam for Use in Illumination and a Method Thereof Application Type: Utility Patent Number: 7151632 Country: United ...
URL: https://www.src.org/library/patent/p0203/
Modified: 2006-12-19 - 22KB
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