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[x] GRC Science Area
NMS – Nanomanufacturing Sciences

Content Type
Events 10
Patent Filings 2

SRC Program
GRC 9
SRC 3

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2014 1
2013 2
2012 2
2011 1
2010 4

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EBSM 4
C2S2 2
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TerraSwarm 1
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ESH – Environment Safety and Hea... 3
PAT – Patterning 2

1 through 12 of 12 similar documents, best matches first.   
1: pdfSlide 1
ITRS - Deterministic Doping, Thomas Schenkel, LBNL, Nov. 12, 2010 Single Ion Implantation Thomas Schenkel Lawrence Berkeley National Laboratory T_Schenkel@LBL.gov ITRS - ...
URL: https://www.src.org/calendar/e004100/e004100-00-session2.pdf
Modified: 2010-11-29 - 52.6MB
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2: TECHCON 2013 (Event E004683) - SRC
TECHCON 2013 Date: Monday, Sept. 9, 2013, 8 a.m. - Tuesday, Sept. 10, 2013, 10 p.m. CT Location: Renaissance Austin Hotel, Austin, TX, United States Event ID: E004683 E004683 image ...
URL: https://www.src.org/calendar/e004683/
Modified: 2014-03-10 - 136KB
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3: TECHCON 2012 (Event E004114) - SRC
TECHCON 2012 Date: Monday, Sept. 10, 2012, 8 a.m. - Tuesday, Sept. 11, 2012, 10 p.m. CT Location: Renaissance Austin Hotel, Austin, TX, United States Event ID: E004114 E004114 ...
URL: https://www.src.org/calendar/e004114/
Modified: 2013-03-11 - 98KB
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4: pdfSlide 1
230 250 270 290 310 0 0 0 0 0 0 0 0 1 2 240 260 280 300 V G (mV) V G (mV) I (nA) V SD = - 30 mV The absence of steps the sequential nature coupling of the atom. Figure 4b shows ...
URL: https://www.src.org/calendar/e004100/e004100-00-session3.pdf
Modified: 2010-11-29 - 29.2MB
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5: Phase-Shifting Test Mask Patterns for Characterizing Illumination...
Phase-Shifting Test Mask Patterns for Characterizing Illumination and Mask Quality in Image Forming Optical Systems Application Type: Utility Patent Number: 7648802 Country: United ...
URL: https://www.src.org/library/patent/p0514/
Modified: 2010-01-19 - 23KB
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6: TECHCON 2011 (Event E004113) - SRC
TECHCON 2011 Date: Monday, Sept. 12, 2011, 8 a.m. - Tuesday, Sept. 13, 2011, 10 p.m. CT Location: Renaissance Austin Hotel, Austin, TX, United States Event ID: E004113 E004113 ...
URL: https://www.src.org/calendar/e004113/
Modified: 2012-03-13 - 97KB
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7: Elastomer Spatial Light Modulators for Extreme Ultraviolet Lithography...
Elastomer Spatial Light Modulators for Extreme Ultraviolet Lithography Application Type: Utility Patent Number: 7092138 Country: United States Status: Filed on 8-Oct-2004, Issued ...
URL: https://www.src.org/library/patent/p0491/
Modified: 2006-08-15 - 22KB
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8: Engineering Research Center for Environmentally Benign Semiconductor...
Engineering Research Center for Environmentally Benign Semiconductor Manufacturing Review Date: Wednesday, March 26, 2014, 7:30 a.m. - Thursday, March 27, 2014, 8 p.m. MT Location: ...
URL: https://www.src.org/calendar/e005160/
Modified: 2014-09-27 - 66KB
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9: Engineering Research Center for Environmentally Benign Semiconductor...
Engineering Research Center for Environmentally Benign Semiconductor Manufacturing Review Date: Wednesday, March 20, 2013, 7 a.m. - Thursday, March 21, 2013, 2 p.m. MT Location: ...
URL: https://www.src.org/calendar/e004929/
Modified: 2013-09-21 - 61KB
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10: pdfMicrosoft Word - Executive Summary-Schenkel-Nov01-10
1 Participants only: Not for distribution. 2nd Deterministic Doping Workshop November 12, 2010, UC Berkeley Executive Summary Title: Deterministic doping by single ion ...
URL: https://www.src.org/...100-03-executive-summary-schenkel.pdf
Modified: 2010-11-09 - 71KB
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11: GRC SEMATECH Engineering Research Center for Environmentally...
GRC SEMATECH Engineering Research Center for Environmentally Benign Semiconductor Manufacturing Review Date: Tuesday, March 20, 2012, 4 p.m. - Thursday, March 22, 2012, 2 p.m. MT ...
URL: https://www.src.org/calendar/e004390/
Modified: 2012-09-22 - 78KB
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12: pdfMicrosoft Word - Executive Summary Asen Asenov
1 Participants only: Not for distribution. 2nd Deterministic Doping Workshop November 12, 2010, UC Berkeley Executive Summary Title: Professor Name(s): Asen Asenov Affiliation(s): ...
URL: https://www.src.org/...04100-11-executive-summary-asenov.pdf
Modified: 2010-11-09 - 54KB
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1 through 12 of 12 similar documents, best matches first.