Questions?
[x] SRC Program
GRC

[x] GRC Science Area
NMS – Nanomanufacturing Sciences

Content Type
Events 13
Patent Filings 3

Year
2016 1
2014 1
2013 1
2012 4
2011 2
2010 4

Center
EBSM 9

Thrust/Theme
ESH – Environment Safety and Hea... 9
NEM – Nanoengineered Materials 2
PAT – Patterning 2
FACSYS – Factory Systems 1

1 through 16 of 16 similar documents, best matches first.   
1: pdfSlide 1
ITRS - Deterministic Doping, Thomas Schenkel, LBNL, Nov. 12, 2010 Single Ion Implantation Thomas Schenkel Lawrence Berkeley National Laboratory T_Schenkel@LBL.gov ITRS - ...
URL: https://www.src.org/calendar/e004100/e004100-00-session2.pdf
Modified: 2010-11-29 - 52.6MB
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2: pdf2nd Deterministic Doping Workshop
1 Participants only: Not for distribution. 2nd Deterministic Doping Workshop November 12, 2010, UC Berkeley Executive Summary Title: Professor and Director Name(s): Michelle ...
URL: https://www.src.org/...4100-05-executive-summary-simmons.pdf
Modified: 2010-11-11 - 208KB
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3: Engineering Research Center for Environmentally Benign Semiconductor...
Engineering Research Center for Environmentally Benign Semiconductor Manufacturing Review Date: Wednesday, March 26, 2014, 7:30 a.m. - Thursday, March 27, 2014, 8 p.m. MT Location: ...
URL: https://www.src.org/calendar/e005160/
Modified: 2014-09-27 - 66KB
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4: Engineering Research Center for Environmentally Benign Semiconductor...
Engineering Research Center for Environmentally Benign Semiconductor Manufacturing Review Date: Wednesday, March 20, 2013, 7 a.m. - Thursday, March 21, 2013, 2 p.m. MT Location: ...
URL: https://www.src.org/calendar/e004929/
Modified: 2013-09-21 - 61KB
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5: pdfMicrosoft Word - Executive Summary Your name _2_.doc
1 2nd Deterministic Doping Workshop November 12, 2010, UC Berkeley Executive Summary Title: Doapnt Activation in Si and Ge by Low Temperature Microwave Anneal Name(s): Yao-Jen Lee ...
URL: https://www.src.org/.../e004100-06-executive-summary-lee.pdf
Modified: 2010-11-09 - 397KB
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6: The Challenges and Opportunities of Atomic Layer Etching (Event...
The Challenges and Opportunities of Atomic Layer Etching Date: Thursday, May 5, 2016, 2 p.m.-3 p.m. ET Location: University of Arizona, Tucson, AZ, United States Type: e-Workshop ...
URL: https://www.src.org/calendar/e005904/
Modified: 2016-11-05 - 34KB
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7: GRC SEMATECH Engineering Research Center for Environmentally...
GRC SEMATECH Engineering Research Center for Environmentally Benign Semiconductor Manufacturing Review Date: Tuesday, March 20, 2012, 4 p.m. - Thursday, March 22, 2012, 2 p.m. MT ...
URL: https://www.src.org/calendar/e004390/
Modified: 2012-09-22 - 78KB
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8: GRC SEMATECH Engineering Research Center for Environmentally...
GRC SEMATECH Engineering Research Center for Environmentally Benign Semiconductor Manufacturing Site Review Date: Wednesday, March 9, 2011, 8 a.m. - Friday, March 11, 2011, 5 p.m. ...
URL: https://www.src.org/calendar/e003989/
Modified: 2011-09-11 - 73KB
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9: Method for Patterning a Radiation Sensitive Layer (Patent P0087...
Method for Patterning a Radiation Sensitive Layer Application Type: Utility Patent Number: 6509138 Country: United States Status: Filed on 12-Jan-2000, Issued on 21-Jan-2003 ...
URL: https://www.src.org/library/patent/p0087/
Modified: 2003-01-21 - 22KB
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10: Solventless, Resistless, Direct Dielectric Patterning (Patent...
Solventless, Resistless, Direct Dielectric Patterning Application Type: Foreign National Patent Number: 171285 Country: Taiwan Status: Filed on 9-Jan-2001, Issued on 2-Jun-2003, ...
URL: https://www.src.org/library/patent/p0207/
Modified: 2003-06-02 - 22KB
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11: Solventless, Resistless, Direct Dielectric Patterning (Patent...
Solventless, Resistless, Direct Dielectric Patterning Application Type: European Patent Office Patent Number: 1269259 Status: Filed on 11-Jan-2001, Issued on 8-Aug-2012, Patent ...
URL: https://www.src.org/library/patent/p0308/
Modified: 2012-08-08 - 22KB
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12: Kickoff Presentation for New Patterning Task (Event E004864)...
Kickoff Presentation for New Patterning Task Date: Tuesday, Oct. 16, 2012, 2 p.m.-4 p.m. ET Location: via web conference, Research Triangle Park, NC, United States Type: e-Workshop ...
URL: https://www.src.org/calendar/e004864/
Modified: 2013-04-16 - 28KB
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13: NMS Nanoengineered Materials Annual Review (Event E004780) -...
NMS Nanoengineered Materials Annual Review Date: Tuesday, June 12, 2012 - Wednesday, June 13, 2012 Location: Dean's Suite 290, College of Business, 1307 West Highland St., ...
URL: https://www.src.org/calendar/e004780/
Modified: 2012-12-13 - 57KB
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14: pdf2012 SRC/SEMATECH ERC Review Agenda
AGENDA 2012 SRC/SEMATECH ERC REVIEW MEETING March 20-22, 2012 Marriott University Park Hotel, Tucson, AZ Tuesday, March 20 4:00 PM - Open Poster Set-Up [Madera Room] Wednesday, ...
URL: https://www.src.org/calendar/e004390/agenda01-30-12.pdf
Modified: 2012-02-17 - 83KB
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15: pdfNMS Patterning Review Agenda
NMS Patterning Review Agenda Date: Tuesday, October 4, 2011 - Thursday, October 6, 2011 Location: The Solution Center, Durham, NC 27703 Tuesday, October 4, 2011 7:30 - 8:30 a.m. ...
URL: https://www.src.org/calendar/e004187/e004187-agenda.pdf
Modified: 2011-09-22 - 44KB
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16: pdfSRCNov12 2010revNov18.ppt
1 SRC Doping Workshop Berkeley, CA Nov 12, 2010 currentsci@aol.com Doping of Atomic-scale Processed Materials and Devices: a view from the present into the next decade Michael ...
URL: https://www.src.org/calendar/e004100/e004100-00-session1.pdf
Modified: 2010-11-29 - 8.2MB
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1 through 16 of 16 similar documents, best matches first.