[x]
Thrust/Theme
Lithography
[x]
Content Type
Patent Filings
[x]
GRC Science Area
MIC – Microstructure Sciences
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1 through 3 of
3 similar documents, best matches first. |
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- 1:
Positive-Tone Photoresist Containing Diester Dissolution Inhibitors...
- Positive-Tone Photoresist Containing Diester Dissolution Inhibitors Application Type: Utility Patent Number: 5532106 Country: United States Status: Filed on 31-Aug-1994, Issued on ...
URL: https://www.src.org/library/patent/p0019/
Modified: 1996-07-02 - 21KB Find Similar Documents
- 2:
Photoresists Containing Water Soluble Sugar Crosslinking Agents...
- Photoresists Containing Water Soluble Sugar Crosslinking Agents Application Type: Utility Patent Number: 5536616 Country: United States Status: Filed on 21-Sep-1994, Issued on ...
URL: https://www.src.org/library/patent/p0018/
Modified: 1996-07-16 - 21KB Find Similar Documents
- 3:
Method of Making Microelectronic Structures Utilizing Photoresists...
- Method of Making Microelectronic Structures Utilizing Photoresists Containing C3C12 Water Soluble Suguar Crosslinking Agents Application Type: Divisional Patent Number: 5532113 ...
URL: https://www.src.org/library/patent/p0021/
Modified: 1996-07-02 - 21KB Find Similar Documents
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