Questions?
[x] Thrust/Theme
Lithography

[x] SRC Program
GRC

[x] Content Type
Patent Filings

GRC Science Area
MIC – Microstructure Sciences 3
DS – Device Sciences 2
NIS – Nanostructure & Integratio... 1

1 through 3 of 3 similar documents, best matches first.   
1: Positive-Tone Photoresist Containing Diester Dissolution Inhibitors...
Positive-Tone Photoresist Containing Diester Dissolution Inhibitors Application Type: Utility Patent Number: 5532106 Country: United States Status: Filed on 31-Aug-1994, Issued on ...
URL: https://www.src.org/library/patent/p0019/
Modified: 1996-07-02 - 21KB
Find Similar Documents
2: Photoresists Containing Water Soluble Sugar Crosslinking Agents...
Photoresists Containing Water Soluble Sugar Crosslinking Agents Application Type: Utility Patent Number: 5536616 Country: United States Status: Filed on 21-Sep-1994, Issued on ...
URL: https://www.src.org/library/patent/p0018/
Modified: 1996-07-16 - 21KB
Find Similar Documents
3: Method of Making Microelectronic Structures Utilizing Photoresists...
Method of Making Microelectronic Structures Utilizing Photoresists Containing C3C12 Water Soluble Suguar Crosslinking Agents Application Type: Divisional Patent Number: 5532113 ...
URL: https://www.src.org/library/patent/p0021/
Modified: 1996-07-02 - 21KB
Find Similar Documents