Questions?
[x] SRC Program
GRC

[x] GRC Science Area
MPS – Material & Process Sciences

Content Type
Patent Filings 62

Center
EBSM 2
FENA 2

Thrust/Theme
PAT – Patterning 19
Factory Systems 13
Pat(MPS) – Patterning 12
BEP – Back End Processes 4
Back End Processes 3
DCMOS – Digital CMOS Technologie... 2
ESH – Environment Safety and Hea... 2
Front End Processes 1

1 through 30 of 62 similar documents, best matches first.   
Results by:Thunderstone Page: 1 2 3 next >>
1: Molecular Transfer Printing Using Block Copolymers (Patent P1163...
Molecular Transfer Printing Using Block Copolymers Application Type: Utility Patent Number: 8133341 Country: United States Status: Filed on 1-Apr-2009, Issued on 13-Mar-2012, ...
URL: https://www.src.org/library/patent/p1163/
Modified: 2012-03-13 - 26KB
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2: Molecular Transfer Printing Using Block Copolymers (Patent P1181...
Molecular Transfer Printing Using Block Copolymers Application Type: Patent Cooperation Treaty Patent Number: PCT/US20090392 Status: Filed on 14-May-2009, Issued on 26-Feb-2011, ...
URL: https://www.src.org/library/patent/p1181/
Modified: 2011-02-26 - 26KB
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3: Guided Self-Assembly of Block Copolymer Films on Interferometrically...
Guided Self-Assembly of Block Copolymer Films on Interferometrically Nanopatterned Substrates Application Type: Utility Patent Number: 6746825 Country: United States Status: Filed ...
URL: https://www.src.org/library/patent/p0293/
Modified: 2004-06-08 - 23KB
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4: Guided Self-Assembly of Block Copolymer Films on Interferometrically...
Guided Self-Assembly of Block Copolymer Films on Interferometrically Nanopatterned Substrates Application Type: Divisional Patent Number: 6926953 Country: United States Status: ...
URL: https://www.src.org/library/patent/p0445/
Modified: 2005-08-09 - 22KB
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5: Fabrication of Complex Three-Dimensional Structures Based on...
Fabrication of Complex Three-Dimensional Structures Based on Directed Assembly of Self-Assembling Materials On Activated Two-Dimensional Templates Application Type: Continuation ...
URL: https://www.src.org/library/patent/p1340/
Modified: 2014-01-07 - 27KB
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6: Fabrication of Complex Three-Dimensional Structures Based on...
Fabrication of Complex Three-Dimensional Structures Based on Directed Assembly of Self-Assembling Materials on Activated Two-Dimensional Templates Application Type: Continuation ...
URL: https://www.src.org/library/patent/p1446/
Modified: 2017-01-10 - 27KB
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7: Using Block Copolymers as Supercritical Fluid Developable Photoresists...
Using Block Copolymers as Supercritical Fluid Developable Photoresists Application Type: Utility Patent Number: 6379874 Country: United States Status: Filed on 26-Oct-1999, Issued ...
URL: https://www.src.org/library/patent/p0097/
Modified: 2002-04-30 - 22KB
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8: Materials and Methods for Creating Imaging Layers (Patent P1140...
Materials and Methods for Creating Imaging Layers Application Type: Continuation Patent Number: 7851252 Country: United States Status: Filed on 17-Feb-2009, Issued on 14-Dec-2010, ...
URL: https://www.src.org/library/patent/p1140/
Modified: 2010-12-14 - 26KB
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9: Fabrication of Complex Three-Dimensional Structures Based on...
Fabrication of Complex Three-Dimensional Structures Based on Directed Assembly of Self-Assembling Materials On Activated Two-Dimensional Templates Application Type: Utility Patent ...
URL: https://www.src.org/library/patent/p0603/
Modified: 2012-05-01 - 27KB
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10: Materials and Methods for Creating Imaging Layers (Patent P1002...
Materials and Methods for Creating Imaging Layers Application Type: European Patent Office Patent Number: 06251517.6 Status: Filed on 22-Mar-2006, Issued on 13-Oct-2009 ...
URL: https://www.src.org/library/patent/p1002/
Modified: 2009-10-13 - 26KB
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11: Materials and Methods for Creating Imaging Layers (Patent P0626...
Materials and Methods for Creating Imaging Layers Application Type: Utility Patent Number: 7514764 Country: United States Status: Filed on 21-Mar-2006, Issued on 7-Apr-2009 ...
URL: https://www.src.org/library/patent/p0626/
Modified: 2009-04-07 - 26KB
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12: Methods for Decreasing Surface Roughness in Novolak-Based Resists...
Methods for Decreasing Surface Roughness in Novolak-Based Resists Application Type: Utility Patent Number: 6162592 Country: United States Status: Filed on 6-Oct-1998, Issued on ...
URL: https://www.src.org/library/patent/p0164/
Modified: 2000-12-19 - 22KB
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13: Method and Apparatus for Providing Film Stress Measurements Based...
Method and Apparatus for Providing Film Stress Measurements Based on Substrates Displacement Application Type: Utility Patent Number: 6826491 Country: United States Status: Filed ...
URL: https://www.src.org/library/patent/p0209/
Modified: 2004-11-30 - 22KB
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14: Micromachines Scanning Thermal Probe Method and Apparatus (Patent...
Micromachines Scanning Thermal Probe Method and Apparatus Application Type: Utility Patent Number: 6692145 Country: United States Status: Filed on 31-Oct-2001, Issued on ...
URL: https://www.src.org/library/patent/p0244/
Modified: 2004-02-17 - 22KB
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15: Methods and Systems for Transmission and Detection of Free Radicals...
Methods and Systems for Transmission and Detection of Free Radicals Application Type: Utility Patent Number: 11592394 Country: United States Status: Filed on 14-Aug-2017, Issued on ...
URL: https://www.src.org/library/patent/p2131/
Modified: 2023-12-28 - 22KB
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16: Organoelement Resists for EUV Lithography and Methods of Making...
Organoelement Resists for EUV Lithography and Methods of Making the Same Application Type: Utility Patent Number: 7326514 Country: United States Status: Filed on 12-Mar-2004, ...
URL: https://www.src.org/library/patent/p0446/
Modified: 2008-02-05 - 22KB
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17: Non-Crystalline Oxides for Use in Microelectronic, Optical and...
Non-Crystalline Oxides for Use in Microelectronic, Optical and Other Applications Application Type: Foreign National Patent Number: 195870 Country: Taiwan Status: Filed on ...
URL: https://www.src.org/library/patent/p0227/
Modified: 2004-11-02 - 27KB
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18: Molecular Glass Photoresists (Patent P0566) - SRC
Molecular Glass Photoresists Application Type: Utility Patent Number: 7452658 Country: United States Status: Filed on 16-Feb-2006, Issued on 18-Nov-2008, Patent Abandoned ...
URL: https://www.src.org/library/patent/p0566/
Modified: 2008-11-18 - 23KB
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19: Novel Non-Crystalline Oxides for Use in Microelectronic, Optical...
Novel Non-Crystalline Oxides for Use in Microelectronic, Optical and Other Applications Application Type: Utility Patent Number: 6787861 Country: United States Status: Filed on ...
URL: https://www.src.org/library/patent/p0225/
Modified: 2004-09-07 - 27KB
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20: Supermolecular Structures and Devices Made From Same (Patent...
Supermolecular Structures and Devices Made From Same Application Type: European Patent Office Patent Number: EP 2 009 699 Country: United Kingdom Status: Filed on 10-Oct-2008, ...
URL: https://www.src.org/library/patent/p1114/
Modified: 2013-04-24 - 25KB
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21: Supermolecular Structures and Devices Made From Same (Patent...
Supermolecular Structures and Devices Made From Same Application Type: Continuation Patent Number: 6897470 Country: United States Status: Filed on 14-Oct-2003, Issued on ...
URL: https://www.src.org/library/patent/p0425/
Modified: 2005-05-24 - 25KB
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22: Supermolecular Structures and Devices Made from Same (Patent...
Supermolecular Structures and Devices Made from Same Application Type: Foreign National Patent Number: 1230406 Country: Taiwan Status: Filed on 23-Feb-2001, Issued on 1-Apr-2005, ...
URL: https://www.src.org/library/patent/p0229/
Modified: 2005-04-01 - 25KB
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23: Supermolecular Structures and Devices Made from Same (Patent...
Supermolecular Structures and Devices Made from Same Application Type: Utility Patent Number: 6664559 Country: United States Status: Filed on 23-Feb-2000, Issued on 16-Dec-2003, ...
URL: https://www.src.org/library/patent/p0165/
Modified: 2003-12-16 - 25KB
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24: Multiple-Thickness Gate Oxide Formed by Oxygen Implantation ...
Multiple-Thickness Gate Oxide Formed by Oxygen Implantation - device claims Application Type: Utility Patent Number: 6855994 Country: United States Status: Filed on 5-Sep-2001, ...
URL: https://www.src.org/library/patent/p0259/
Modified: 2005-02-15 - 26KB
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25: Multiple-Thickness Gate Oxide Formed by Oxygen Implantation ...
Multiple-Thickness Gate Oxide Formed by Oxygen Implantation - Method claims Application Type: Utility Patent Number: 6753229 Country: United States Status: Filed on 24-Nov-1999, ...
URL: https://www.src.org/library/patent/p0086/
Modified: 2004-06-22 - 26KB
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26: Capacitorless Dram Device on Silicon-On-Insulator Substrate ...
Capacitorless Dram Device on Silicon-On-Insulator Substrate Application Type: European Patent Office Patent Number: 694291064 Status: Filed on 1-Dec-1994, Issued on 14-Nov-2001, ...
URL: https://www.src.org/library/patent/p0287/
Modified: 2001-11-14 - 25KB
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27: Capacitorless Dram Device on Silicon-On-Insulator Substrate ...
Capacitorless Dram Device on Silicon-On-Insulator Substrate Application Type: European Patent Office Patent Number: 0731972 Status: Filed on 1-Dec-1994, Issued on 14-Nov-2001, ...
URL: https://www.src.org/library/patent/p0234/
Modified: 2001-11-14 - 25KB
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28: Nanostructures Including Controllably positioned and Aligned...
Nanostructures Including Controllably positioned and Aligned Synthetic Nanotubes, and related methods Application Type: Foreign National Patent Number: 110957 Country: Singapore ...
URL: https://www.src.org/library/patent/p0554/
Modified: 2007-08-31 - 23KB
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29: Multiple-Thickness Gate Oxide Formed by Oxygen Implantation ...
Multiple-Thickness Gate Oxide Formed by Oxygen Implantation Application Type: Foreign National Patent Number: NI154458 Country: Taiwan Status: Filed on 1-Dec-1999, Issued on ...
URL: https://www.src.org/library/patent/p0211/
Modified: 2003-05-07 - 26KB
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30: Optical Proximity Correction Using Regression (Patent P1118)...
Optical Proximity Correction Using Regression Application Type: Utility Patent Number: 8201110 Country: United States Status: Filed on 14-Apr-2009, Issued on 12-Jun-2012, Patent ...
URL: https://www.src.org/library/patent/p1118/
Modified: 2012-06-12 - 24KB
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1 through 30 of 62 similar documents, best matches first.   
Results by:Thunderstone Page: 1 2 3 next >>