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- 1:
Elastomer Spatial Light Modulators for Extreme Ultraviolet Lithography...
- Elastomer Spatial Light Modulators for Extreme Ultraviolet Lithography Application Type: Utility Patent Number: 7092138 Country: United States Status: Filed on 8-Oct-2004, Issued ...
URL: https://www.src.org/library/patent/p0491/
Modified: 2006-08-15 - 22KB
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- 2:
Phase-Shifting Test Mask Patterns for Characterizing Illumination...
- Phase-Shifting Test Mask Patterns for Characterizing Illumination and Mask Quality in Image Forming Optical Systems Application Type: Utility Patent Number: 7648802 Country: United ...
URL: https://www.src.org/library/patent/p0514/
Modified: 2010-01-19 - 23KB
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