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[x] Content Type
Patent Filings

[x] SRC Program
GRC

Center
FENA 2

Thrust/Theme
PAT – Patterning 18
Pat(MPS) – Patterning 6
MTMP – Metrology Tools Matls & P... 2
Masks 2
BEP – Back End Processes 1
DCMOS – Digital CMOS Technologie... 1
ISD – Integrated System Design 1
Materials 1
NMP – Nanomanufacturing Material... 1

GRC Science Area
NMS – Nanomanufacturing Sciences 23
MPS – Material & Process Science... 17
LIT – Lithography Sciences 9
DS – Device Sciences 1
ICSS – Integrated Circuit & Syst... 1
IPS – Interconnect & Packaging S... 1
MBP – Materials & Bulk Processes... 1
MIC – Microstructure Sciences 1

1 through 30 of 32 similar documents, best matches first.   
Results by:Thunderstone Page: 1 2 next >>
1: Micromachines Scanning Thermal Probe Method and Apparatus (Patent...
Micromachines Scanning Thermal Probe Method and Apparatus Application Type: Utility Patent Number: 6692145 Country: United States Status: Filed on 31-Oct-2001, Issued on ...
URL: https://www.src.org/library/patent/p0244/
Modified: 2004-02-17 - 22KB
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2: Molecular Transfer Printing Using Block Copolymers (Patent P1163...
Molecular Transfer Printing Using Block Copolymers Application Type: Utility Patent Number: 8133341 Country: United States Status: Filed on 1-Apr-2009, Issued on 13-Mar-2012, ...
URL: https://www.src.org/library/patent/p1163/
Modified: 2012-03-13 - 26KB
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3: Molecular Transfer Printing Using Block Copolymers (Patent P1181...
Molecular Transfer Printing Using Block Copolymers Application Type: Patent Cooperation Treaty Patent Number: PCT/US20090392 Status: Filed on 14-May-2009, Issued on 26-Feb-2011, ...
URL: https://www.src.org/library/patent/p1181/
Modified: 2011-02-26 - 26KB
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4: Directed Assembly of Triblock Copolymers (Patent P0617) - SRC
Directed Assembly of Triblock Copolymers Application Type: Utility Patent Number: 8618221 Country: United States Status: Filed on 12-Oct-2006, Issued on 31-Dec-2013 Organization: ...
URL: https://www.src.org/library/patent/p0617/
Modified: 2013-12-31 - 22KB
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5: Methods and Compositions for Forming Aperiodic Patterned Copolymer...
Methods and Compositions for Forming Aperiodic Patterned Copolymer Films Application Type: Foreign National Patent Number: 5377857 Country: Japan Status: Filed on 22-Nov-2005, ...
URL: https://www.src.org/library/patent/p1025/
Modified: 1995-01-03 - 27KB
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6: Methods and Compositions for Forming Aperiodic Patterned Copolymer...
Methods and Compositions for Forming Aperiodic Patterned Copolymer Films Application Type: European Patent Office Patent Number: PCT/US20050425 Status: Filed on 22-Nov-2005, Issued ...
URL: https://www.src.org/library/patent/p1024/
Modified: 2007-08-08 - 26KB
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7: Methods and Compositions for Forming Aperiodic Patterned Copolymer...
Methods and Compositions for Forming Aperiodic Patterned Copolymer Films Application Type: Utility Patent Number: 8287957 Country: United States Status: Filed on 22-Nov-2005, ...
URL: https://www.src.org/library/patent/p0517/
Modified: 2012-10-16 - 27KB
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8: Materials and Methods for Creating Imaging Layers (Patent P1140...
Materials and Methods for Creating Imaging Layers Application Type: Continuation Patent Number: 7851252 Country: United States Status: Filed on 17-Feb-2009, Issued on 14-Dec-2010, ...
URL: https://www.src.org/library/patent/p1140/
Modified: 2010-12-14 - 26KB
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9: Materials and Methods for Creating Imaging Layers (Patent P1002...
Materials and Methods for Creating Imaging Layers Application Type: European Patent Office Patent Number: 06251517.6 Status: Filed on 22-Mar-2006, Issued on 13-Oct-2009 ...
URL: https://www.src.org/library/patent/p1002/
Modified: 2009-10-13 - 26KB
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10: Materials and Methods for Creating Imaging Layers (Patent P0626...
Materials and Methods for Creating Imaging Layers Application Type: Utility Patent Number: 7514764 Country: United States Status: Filed on 21-Mar-2006, Issued on 7-Apr-2009 ...
URL: https://www.src.org/library/patent/p0626/
Modified: 2009-04-07 - 26KB
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11: DENSITY MULTIPLICATION AND IMPROVED LITHOGRAPHY BY DIRECTED BLOCK...
DENSITY MULTIPLICATION AND IMPROVED LITHOGRAPHY BY DIRECTED BLOCK COPOLYMER ASSEMBLY Application Type: Patent Cooperation Treaty Patent Number: 10438626 Status: Filed on ...
URL: https://www.src.org/library/patent/p1132/
Modified: 2010-04-17 - 26KB
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12: Density Multiplication and Improved Lithography by Directed Block...
Density Multiplication and Improved Lithography by Directed Block Copolymer Assembly Application Type: Utility Patent Number: 9183870 Country: United States Status: Filed on ...
URL: https://www.src.org/library/patent/p1116/
Modified: 2015-11-10 - 26KB
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13: Methods and Compositions for Forming Patterns with Isolated or...
Methods and Compositions for Forming Patterns with Isolated or Discrete Features Using Block Coplymer Materials Application Type: Divisional Patent Number: 8501304 Country: United ...
URL: https://www.src.org/library/patent/p1333/
Modified: 2013-08-06 - 25KB
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14: Methods and Compositions for Forming Patterns with Isolated or...
Methods and Compositions for Forming Patterns with Isolated or Discrete Features Using Block Copolymer Materials Application Type: Utility Patent Number: 8133534 Country: United ...
URL: https://www.src.org/library/patent/p1043/
Modified: 2012-03-13 - 25KB
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15: Methods for Decreasing Surface Roughness in Novolak-Based Resists...
Methods for Decreasing Surface Roughness in Novolak-Based Resists Application Type: Utility Patent Number: 6162592 Country: United States Status: Filed on 6-Oct-1998, Issued on ...
URL: https://www.src.org/library/patent/p0164/
Modified: 2000-12-19 - 22KB
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16: Method and Apparatus for Providing Film Stress Measurements Based...
Method and Apparatus for Providing Film Stress Measurements Based on Substrates Displacement Application Type: Utility Patent Number: 6826491 Country: United States Status: Filed ...
URL: https://www.src.org/library/patent/p0209/
Modified: 2004-11-30 - 22KB
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17: Guided Self-Assembly of Block Copolymer Films on Interferometrically...
Guided Self-Assembly of Block Copolymer Films on Interferometrically Nanopatterned Substrates Application Type: Divisional Patent Number: 6926953 Country: United States Status: ...
URL: https://www.src.org/library/patent/p0445/
Modified: 2005-08-09 - 22KB
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18: Fabrication of Complex Three-Dimensional Structures Based on...
Fabrication of Complex Three-Dimensional Structures Based on Directed Assembly of Self-Assembling Materials on Activated Two-Dimensional Templates Application Type: Continuation ...
URL: https://www.src.org/library/patent/p1446/
Modified: 2017-01-10 - 27KB
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19: Fabrication of Complex Three-Dimensional Structures Based on...
Fabrication of Complex Three-Dimensional Structures Based on Directed Assembly of Self-Assembling Materials On Activated Two-Dimensional Templates Application Type: Continuation ...
URL: https://www.src.org/library/patent/p1340/
Modified: 2014-01-07 - 27KB
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20: Fabrication of Complex Three-Dimensional Structures Based on...
Fabrication of Complex Three-Dimensional Structures Based on Directed Assembly of Self-Assembling Materials On Activated Two-Dimensional Templates Application Type: Utility Patent ...
URL: https://www.src.org/library/patent/p0603/
Modified: 2012-05-01 - 27KB
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21: Methods and Systems for Transmission and Detection of Free Radicals...
Methods and Systems for Transmission and Detection of Free Radicals Application Type: Utility Patent Number: 11592394 Country: United States Status: Filed on 14-Aug-2017, Issued on ...
URL: https://www.src.org/library/patent/p2131/
Modified: 2023-12-28 - 22KB
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22: Guided Self-Assembly of Block Copolymer Films on Interferometrically...
Guided Self-Assembly of Block Copolymer Films on Interferometrically Nanopatterned Substrates Application Type: Utility Patent Number: 6746825 Country: United States Status: Filed ...
URL: https://www.src.org/library/patent/p0293/
Modified: 2004-06-08 - 23KB
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23: Organoelement Resists for EUV Lithography and Methods of Making...
Organoelement Resists for EUV Lithography and Methods of Making the Same Application Type: Utility Patent Number: 7326514 Country: United States Status: Filed on 12-Mar-2004, ...
URL: https://www.src.org/library/patent/p0446/
Modified: 2008-02-05 - 22KB
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24: Stress-Free Mount for Imaging Mask (Patent P0056) - SRC
Stress-Free Mount for Imaging Mask Application Type: Divisional Patent Number: 5675403 Country: United States Status: Filed on 28-May-1996, Issued on 7-Oct-1997, Patent Expired ...
URL: https://www.src.org/library/patent/p0056/
Modified: 1997-10-07 - 24KB
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25: Stress-Free Mount for Imaging Mask (Patent P0076) - SRC
Stress-Free Mount for Imaging Mask Application Type: Utility Patent Number: 5536559 Country: United States Status: Filed on 22-Nov-1994, Issued on 16-Jul-1996, Patent Expired ...
URL: https://www.src.org/library/patent/p0076/
Modified: 1996-07-16 - 24KB
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26: Low Dielectric Constant (Low-K) Dielectric and Method of Forming...
Low Dielectric Constant (Low-K) Dielectric and Method of Forming The Same Application Type: Utility Patent Number: 10090150 Country: United States Status: Filed on 6-Sep-2017, ...
URL: https://www.src.org/library/patent/p1731/
Modified: 2018-10-02 - 24KB
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27: Identifying Program Phase Changes Through Program Working Set...
Identifying Program Phase Changes Through Program Working Set Analysis Application Type: Utility Patent Number: 7890933 Country: United States Status: Filed on 5-Feb-2004, Issued ...
URL: https://www.src.org/library/patent/p0367/
Modified: 2011-02-15 - 22KB
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28: Methods and Compositions for Imaging Acids in Chemically Amplified...
Methods and Compositions for Imaging Acids in Chemically Amplified Photoresists Using pH-Dependent Fluorophores Application Type: Divisional Patent Number: 6566030 Country: United ...
URL: https://www.src.org/library/patent/p0224/
Modified: 2003-05-20 - 23KB
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29: Methods and Compositions for Imaging Acids in Chemically Amplified...
Methods and Compositions for Imaging Acids in Chemically Amplified Photoresists Using pH-Dependent Fluorophores Application Type: Utility Patent Number: 6376149 Country: United ...
URL: https://www.src.org/library/patent/p0088/
Modified: 2002-04-23 - 23KB
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30: Carbon Nanotubes and Methods of Fabrication Thereof Using a Liquid...
Carbon Nanotubes and Methods of Fabrication Thereof Using a Liquid Phase Catalyst Precursor Application Type: Utility Patent Number: 6401526 Country: United States Status: Filed on ...
URL: https://www.src.org/library/patent/p0266/
Modified: 2002-06-11 - 22KB
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1 through 30 of 32 similar documents, best matches first.   
Results by:Thunderstone Page: 1 2 next >>